Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Long wavelength interface optical phonons measured by HREELS are used to characterize interfaces between different dielectric materials. Four cases are presented: (1) a diffuse interface SiO2Si(100); (2) an epitaxial abrupt interface: CaF2Si(111); (3) an epitaxial reactive interface: AlSbSb(111); (4) an epitaxial periodic interface in a GaAsAlGaAs superlattice. Complementary information about the chemical structure of the first three interfaces is given by synchrotron radiation induced photoemission. © 1990.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Imran Nasim, Melanie Weber
SCML 2024
J.C. Marinace
JES
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials