C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
No abstract available.
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Hiroshi Ito, Reinhold Schwalm
JES
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics