Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Simulations for Al2O3 suggest that thermocapillary flow is the dominant mass transport mechanism for Czochralski growth in space vehicles. The residue of buoyant convection generated by microgravity is insignificant in comparison. Increasing the microgravity by tenfold, or switching it off completely, i.e., introducing "g-jitter," generates barely discernible changes in the flow field. On the other hand, neglecting thermocapillary flow leads to gross errors. These conclusions obtain even though the thermocapillary coefficient of Al2O3 is rather small compared with that of many other materials used in Czochralski growth. © 1980.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Reisman, M. Berkenblit, et al.
JES
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Frank Stem
C R C Critical Reviews in Solid State Sciences