P. Alnot, D.J. Auerbach, et al.
Surface Science
Thiol-ene photopolymers were studied as patternable resins for nanocontact molding imprint lithography. Photopolymerizable thiol and ene monomer mixtures were used, and after molding, patterned thiol-ene polymer features the size and shape of the original molds were replicated. Adhesion and release were examined and controlled by manipulating the surface chemistry of the substrate and mold. A direct correlation between cured thiol-ene polymer modulus and pattern fidelity was observed. © 2007 American Chemical Society.
P. Alnot, D.J. Auerbach, et al.
Surface Science
K.A. Chao
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry