Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
A. Gangulee, F.M. D'Heurle
Thin Solid Films
J.C. Marinace
JES