Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The elasticity theory of the twist-grain-boundary phase in chiral smectic liquid crystals for the case of (where 2 is the twist-grain-boundary angle) irrational is developed. It implies that fluctuations destroy long-ranged translational order, leading to algebraic (rather than -function) singularities in the x-ray scattering near both a cylinder in reciprocal space and isolated Bragg peaks along its axis. These results, which could be experimentally tested through high-resolution x-ray scattering, also apply to nearly irrational =J/s, with J and s integers and s1, out to length scales exponentially large in s. © 1991 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Reisman, M. Berkenblit, et al.
JES
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999