Conference paper
Gate dielectrics for high mobility semiconductors
A. Dimoulas, Y. Panayiotatos, et al.
ECS Meeting 2008
We report electrical measurements on hexagonal silicon-germanium (hex-SiGe), a group IV alloy with direct bandgap. Electrical contacts are formed by metal alloying and doping is achieved using ion implantation. The metastable hex-SiGe phase is recovered after implantation by solid phase recrystallization. Independent of the metal used, contacts on n-type samples resulted in Schottky barriers due to Fermi level pinning of hex-SiGe. Overall, this constitutes a first step toward use of hex-SiGe for optoelectronic applications.
A. Dimoulas, Y. Panayiotatos, et al.
ECS Meeting 2008
F. Balduini, A. Molinari, et al.
Physical Review B
M. El Kazzi, D.J. Webb, et al.
Microelectronic Engineering
S.J. Koester, E.W. Kiewra, et al.
Applied Physics Letters