Conference paper
Post-Si CMOS: III-V n-MOSFETs with high-k gate dielectrics
Yanning Sun, S.J. Koester, et al.
CS MANTECH 2007
We report electrical measurements on hexagonal silicon-germanium (hex-SiGe), a group IV alloy with direct bandgap. Electrical contacts are formed by metal alloying and doping is achieved using ion implantation. The metastable hex-SiGe phase is recovered after implantation by solid phase recrystallization. Independent of the metal used, contacts on n-type samples resulted in Schottky barriers due to Fermi level pinning of hex-SiGe. Overall, this constitutes a first step toward use of hex-SiGe for optoelectronic applications.
Yanning Sun, S.J. Koester, et al.
CS MANTECH 2007
M. El Kazzi, D.J. Webb, et al.
Microelectronic Engineering
A. Dimoulas, Y. Panayiotatos, et al.
ECS Meeting 2008
C. Rossel, M. Sousa, et al.
Microelectronic Engineering