Electrodeposition of SbTe phase-change alloys

Electrodeposition of SbTe thin films was investigated at room temperature, where amorphous deposits were obtained. The electrodeposition of Sb was found to be induced by Te, while the latter was not affected by the Sb. Detailed studies on this induced deposition were carried out by varying the Sb(III) and Te(IV) concentrations, pH, and agitation. The Sb deposition rate was found to be independent of the concentrations of both species but dependent on the pH and agitation. A phase transition from amorphous films into crystalline Sb2 Te3 at 120°C was observed for the plated SbTe. © 2007 The Electrochemical Society.