Electron beam tester measurements of switching noise in VLSI circuits

Electron beam testers can be used to measure the noise generated on power supply voltages by the operation of VLSI circuits. The power supply busses on the circuit are probed by the electron beam, resulting in a time-dependent voltage waveform. This method of measurement assures that the noise is measured near the active circuit, where its impact on the circuit is most easily assessed. Examples are presented to illustrate the mechanism of noise generation and the use of an E-beam tester to measure the noise. © 1991.