William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Paper
Electron-gun Evaporators of Refractory Metals Compatible with Molecular Beam Epitaxy
Abstract
The construction and performance of electrostatic electron gun evaporators, placed in a molecular beam epitaxy system are described. Minimizing electron emittance led to an evaporation of refractory metals at a vacuum level of 2x 10“lo-2X 10 9 Torr. © 1985, American Vacuum Society. All rights reserved.
Related
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters