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Modeling polarization for Hyper-NA lithography tools and masks
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Embedded cluster calculations performed on both ground (4A2g) and excited (4T2g) states of substitutional Cr in halide elpasolites account successfully for the pressure dependence of photoluminescence spectra. © 1991, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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