Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Two general types of energy-dependent cross-section variations are demonstrated for inverse photoemission: (i) an atomic effect based on the spatial extent of the wave function and (ii) a solidstate effect caused by peaks in the Fourier spectrum of bandlike states. As examples, data are shown on the photon-energy dependence of (i) the 5d- to 4f-intensity ratio in Gd and (ii) the intensity of broken-bond states on Si(111). © 1984 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
K.N. Tu
Materials Science and Engineering: A
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009