Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The average kinetic energy, at the barrier, of particles escaping out of an extremely underdamped potential well is calculated and compared with computational data. This energy approaches zero as the well damping is allowed to vanish. © 1984 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials
J.K. Gimzewski, T.A. Jung, et al.
Surface Science