Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
We study the effect of convection on the concentration profiles in electrolytic cells during electrochemical deposition without a supporting electrolyte. We give theoretical evidence that convection decreases the size of the space charge on the cathodic side during fast electrochemical deposition. This effect may provide a limiting amplitude of the convective motion. © 1993 The American Physical Society.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Sharee J. McNab, Richard J. Blaikie
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