Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
No abstract available.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
Naga Ayachitula, Melissa Buco, et al.
SCC 2007
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences