O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Paper
Experimental demonstration of the validity of accelerated radiation damage testing of x-ray mask materials
Abstract
No abstract available.
Related
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures