Structure of the silicon-oxide interface
Yuhai Tu, J. Tersoff
Thin Solid Films
A crystal facet is metastable under stress, but the process of growth or sublimation roughens the facet and is expected to render it unstable. This poses a fundamental limit for heteroepitaxial growth of planar layers, e.g., in semiconductor devices. An analysis shows that this facet-growth instability can be suppressed to an arbitrary degree by growing slowly. Moreover, the local stress (“force dipole”) inherent in atomic steps introduces a new, purely kinetic effect that dominates at low strain and can render planar growth dynamically stable. © 2001 The American Physical Society.
Yuhai Tu, J. Tersoff
Thin Solid Films
J. Tersoff, R.M. Feenstra, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
D.S. Franzblau, J. Tersoff
Physical Review Letters
J. Tersoff
Physical Review Letters