Conference paper
VLSI-NEMS chip for AFM data storage
M. Despont, J. Brugger, et al.
MEMS 1999
Although tunneling microscopy at the age of ten years is a fairly young technique, it has already produced several offspring. One of them is force microscopy, which at present is in fact the most important one in terms of the number of people dealing with it directly or indirectly. This paper discusses its strengths and limitations as well as its potential future applications. © 1992.
M. Despont, J. Brugger, et al.
MEMS 1999
G. Binnig, H. Rohrer
Surface Science
P. Vettiger, J. Brugger, et al.
Microelectronic Engineering
P. Vettiger, G. Cross, et al.
IEEE TNANO