Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have observed fractionally quantized states in samples which also exhibit one-dimensional quantum behavior. We observe minima in the magnetocapacitance of doubly confined electrons at fractional filling factors. This observation demonstrates that the addition of boundaries on the scale of our experiments does not destroy the incompressibility of the Laughlin-fluid state. © 1988 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A. Reisman, M. Berkenblit, et al.
JES
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron