Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A moment method is presented for handling arbitrarily shaped 2-D and 3-D waveguides that involve conductors, finite-size dielectric regions, or both. A novel procedure for modeling the dielectric allows 2-D rooftop functions to represent both the 3-D polarization current i n the dielectric and the surface current on the conductors. Examples include microstrip and dielectric waveguides. Numerical convergence, consistency with physical principles, and agreement with the literature are demonstrated.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hiroshi Ito, Reinhold Schwalm
JES
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
David B. Mitzi
Journal of Materials Chemistry