Peter J. Price
Surface Science
The use of a generalized series solution technique for analyzing semiconductor integrated-optic waveguide devices is presented. This technique can be employed to obtain TE and TM modes for any slab-waveguide structure with an arbitrary index variation, as long as the square of the index in each layer can be fitted to a polynomial function of position. The method is applied to a slab waveguide with a parabolic index profile, an AlGaAs heterostructure electrooptic phase modulator, heterostructure ridge-waveguide structures with sloped sidewalls, and an InGaAs-AlGaAs graded-index separate-confinement-heterojunction quantum-well structure.
Peter J. Price
Surface Science
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP