J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Direct self-diffusion measurements in vapor-deposited polycrystalline Au films have been made using 195Au radioactive tracer and an r.f. back-sputtering technique for serial sectioning. A temperature range of 117°-177°C was investigated. It has been demonstrated that self-diffusion in thin Au films at these low temperatures takes place by rapid transport of the tracer atoms along the grain boundaries. The grain boundary self-diffusion parameters are Qb=1.0±0.1 eV and δDb0 = 9 × 10-10 cm3/sec, which compare well with those in bulk polycrystalline Au. © 1974.
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
J.H. Stathis, R. Bolam, et al.
INFOS 2005
John G. Long, Peter C. Searson, et al.
JES
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering