William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A method for growing heteroepitaxial Si films on sapphire was developed using a 6 nm thin Al layer at substrate temperature of 600 °C. Subsequently, the growth of Si nanowires was demonstrated on these films at 490 °C without breaking vacuum. We characterized the properties of the Si films by Raman scattering, X-ray diffraction and transmission electron microscopy and show that the crystal quality and dopant control are promising for photovoltaic applications. © 2010 Elsevier B.V.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules