Julien Autebert, Aditya Kashyap, et al.
Langmuir
No abstract available.
Julien Autebert, Aditya Kashyap, et al.
Langmuir
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures