X. Liu, A. Petrou, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
No abstract available.
X. Liu, A. Petrou, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
B.T. Jonker, L.P. Fu, et al.
Journal of Electronic Materials
J. Warnock, L. Sigal, et al.
ICCD 1997
T.C. Chen, E. Ganin, et al.
IEEE T-ED