J.M. Hong, M.C. Wu, et al.
Applied Physics Letters
No abstract available.
J.M. Hong, M.C. Wu, et al.
Applied Physics Letters
Y. Hsu, W.I. Wang, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
S. Tiwari, J.J. Welser, et al.
DRC 1998
S.S. Bose, B. Lee, et al.
Journal of Applied Physics