Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
We present experimental studies on the performance of ultra-thin body SOI tunnel FETs depending on channel length, gate oxide thickness and source/drain doping concentrations. Electrical measurements show no dependance on channel length, however, a strong dependance on gate oxide thickness and doping concentration is found. Our experimental results match calculations based on a simple Landauer model employing the Wenzel-Kramer-Brillouin approximation for the tunneling process. Bandgap narrowing and the electrostatics of the tunneling junction are found to be the main factors impacting the on-state performance of the tunnel FET. © 2009 Elsevier Ltd. All rights reserved.
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
T. Schneider, E. Stoll
Physical Review B
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films