Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
An improved method for obtaining cross-sectional images of thin polymer films by transmission electron microscopy is described. Two examples are described in order to demonstrate the simplicity and flexibility of the technique. In the first example, the structure of a highly ordered block copolymer on a solid surface is examined. In the second example, the behaviour of colloidal gold particles at the interface between immiscible polymers is considered. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T.N. Morgan
Semiconductor Science and Technology
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
John G. Long, Peter C. Searson, et al.
JES