A. Gangulee, F.M. D'Heurle
Thin Solid Films
The effect of abrasive‐particle properties on surface‐finishing residual stresses, surface finish, and material removal rates during the lapping of ferrite and aluminium oxide is quantified experimentally. It is shown that lapping with softer abrasives and smaller particles results in lower compressive residual stresses near the surface and improved surface finish. These results demonstrate possible methods for controlling surface finishing residual stresses in ceramics while at the same time achieving dimensional accuracy. Copyright © 1990, Wiley Blackwell. All rights reserved
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
P. Alnot, D.J. Auerbach, et al.
Surface Science