Infrared laser induced reaction of SF6 with silicon surfaces

Paper

15 Jul 2008

Infrared laser induced reaction of SF₆ with silicon surfaces

No abstract available.

Paper

A. Mödl, T. Gritsch, et al.

Physical Review Letters

Paper

Masako Suto, Xiuyan Wang, et al.

The Journal of Chemical Physics

Conference paper

H. Coufal, T.J. Chuang, et al.

International Conference on Laser Processing and Diagnostics 1983

Conference paper

T.J. Chuang, Ingo Hussla, et al.

International Conference on Laser Processing and Diagnostics 1983