Infrared laser induced reaction of SF6 with silicon surfaces

Paper

15 Jul 2008

Infrared laser induced reaction of SF₆ with silicon surfaces

No abstract available.

Conference paper

T.J. Chuang, H. Seki

SPIE Annual Technical Symposium 1982

Paper

W. Sesselmann, E.E. Marinero, et al.

Applied Physics A Solids and Surfaces

Paper

T.J. Chuang, H. Seki, et al.

Surface Science

Paper

K. Domen, T.J. Chuang

The Journal of Chemical Physics