Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We present a class of integral equation methods for the solution of biharmonic boundary value problems, with applications to two-dimensional Stokes flow and Isotropie elasticity. The domains may be multiply-connected and finite, infinite or semi-infinite in extent. Our analytic formulation is based on complex variables, and our fast multipole-based iterative solution procedure requires O(N) operations, where N is the number of nodes in the discretization of the boundary. The performance of the methods is illustrated with several large-scale numerical examples. © 1996 Academic Press, Inc.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Simeon Furrer, Dirk Dahlhaus
ISIT 2005
A.R. Conn, Nick Gould, et al.
Mathematics of Computation
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BMC Bioinformatics