Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The "molecular dynamics" method combined with Ensemble Monte Carlo, which has previously been used to investigate the effects of electron-electron Coulomb forces in a homogenous state, is applied to a simulation of the effect of mutual Coulomb scattering of the electrons in two parallel semiconductor layers separated by a thin dielectric layer. A significant rate of transfer of the Joule energy, from one layer driven by an applied field into a hot electron state to the other passive layer, is found. © 1988.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
David B. Mitzi
Journal of Materials Chemistry
Ronald Troutman
Synthetic Metals
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001