Sung Ho Kim, Oun-Ho Park, et al.
Small
This is a review on interface reactions with formation of a solid phase on a solid substrate. It is noted that the phenomena regarding the chemical reaction occurring in the process is prevalent and it involves a variety of conditions. The state of reactants and products is an important factor that needs special attention. For an easier understanding of the phenomena, the paper includes different reference materials expected to give necessary information regarding the topic discussed.
Sung Ho Kim, Oun-Ho Park, et al.
Small
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Eloisa Bentivegna
Big Data 2022