Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Imran Nasim, Melanie Weber
SCML 2024
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano