William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The extent of imidization was determined as a function of depth in films of the deuterated version of a model polyimide precursor, polyamic ethyl ester (d-PAE), using a novel ion beam analysis technique. Monitoring the loss of the deuterated ethyl moiety provided a precise means of evaluating the extent of imidization f as a function of the temperature of imidization and time at the imidization temperature. The imidization reaction was found to proceed uniformly as a function of depth down to 700 nm below the surface. The imidization kinetics followed a two-stage sequence in which the initial rate of imidization was rapid, up to f values of ca. 0.6, whereupon the reaction rate diminished sharply. © 1990.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Frank Stem
C R C Critical Reviews in Solid State Sciences
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters