Conference paper
Lactones in 193 nm resists: What do they do?
Hiroshi Ito, Hoa D. Truong, et al.
SPIE Advanced Lithography 2008
An in situ nuclear magnetic resonance (NMR) monitoring, and the application of mercury method to the copolymerization of maleic anhydride and norbornene derivatives is presented. NMR spectral data were processed for quantitative analysis by integration. Integration of the whole resonance range and the dioxane peak remained constant throughout the kinetics run, confirming the quantitative nature of the measurements.
Hiroshi Ito, Hoa D. Truong, et al.
SPIE Advanced Lithography 2008
Hiroshi Ito, Dolores C. Miller
J Polym Sci Part A
Hiroshi Ito, Dolores Miller, et al.
J Polym Sci Part A
John G. Maltabcs, Steven J. Holmes, et al.
Microlithography 1990