Large area coatings with uniform thickness fabricated in a small vacuum chamber

Paper

15 Jul 1989

Abstract

No abstract available.

Paper

Eberhard Spiller, Armin Segmüller, et al.

Applied Physics Letters

Conference paper

Sharon R. Jelinsky, Barry Welsh, et al.

Proceedings of SPIE 1989

Paper

Eberhard Spiller

Applied Physics Letters

Paper

J. Patrick Henry, Eberhard Spiller, et al.

Applied Physics Letters