W.D. Hinsberg, F.A. Houle, et al.
Microlithography 2000
Paper
Laser chemical vapor deposition of copper
Abstract
The first laser-induced deposition of copper has been demonstrated using a volatile copper coordination complex. The technique is characterized by reasonable rates and by the high quality of copper produced.
Related
G.M. Wallraff, D. Medeiros, et al.
Microlithography 2005
W.D. Hinsberg, F.A. Houle, et al.
Macromolecules
K.A. Singmaster, F.A. Houle, et al.
Applied Physics Letters