J. Cl. Puippe, R.E. Acosta, et al.
JES
Paper
Laser energy deposition at sapphire surfaces studied by pulsed photothermal deformation
Abstract
A surface deformation technique measures the energy deposited in sapphire surfaces irradiated by focused excimer laser light. The absorbed energy creates ≲3 electron-hole pairs/oxygen atom, consistent with a photochemical etching mechanism.
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