R. Ghez, M.B. Small
JES
The formation of conducting films from composite films comprised of gold clusters in plasma polymerized polyfluorocarbon (PPFC) is described. A focused, visible laser beam is used to coalesce the gold clusters within the PPFC matrix. Heating the composite with the laser causes the film to collapse with a loss of weight due to decomposition and volatilization of the polymer. Under the appropriate laser power and scanning conditions, coalescence of the gold particles results in a conducting metal line, exhibiting close to bulk metal resistivity. © 1994.
R. Ghez, M.B. Small
JES
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films