Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The formation of conducting films from composite films comprised of gold clusters in plasma polymerized polyfluorocarbon (PPFC) is described. A focused, visible laser beam is used to coalesce the gold clusters within the PPFC matrix. Heating the composite with the laser causes the film to collapse with a loss of weight due to decomposition and volatilization of the polymer. Under the appropriate laser power and scanning conditions, coalescence of the gold particles results in a conducting metal line, exhibiting close to bulk metal resistivity. © 1994.
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Imran Nasim, Melanie Weber
SCML 2024
T. Schneider, E. Stoll
Physical Review B