William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
R.W. Gammon, E. Courtens, et al.
Physical Review B
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Mark W. Dowley
Solid State Communications