E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
K.A. Chao
Physical Review B
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering