Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
No abstract available.
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
Vladimir Yanovski, Israel A. Wagner, et al.
Ann. Math. Artif. Intell.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
T. Graham, A. Afzali, et al.
Microlithography 2000