Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Paper
Lecture Series: Impact of Computers On Behavioral Sciences Research
Abstract
No abstract available.
Related
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Y.Y. Li, K.S. Leung, et al.
J Combin Optim
Da-Ke He, Ashish Jagmohan, et al.
ISIT 2007