Conference paper
Characterization of a next generation step-and-scan system
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The combination of two or more generalized Crank Nicolson schemes in order to obtain second, third and fourth order accurate discretizations in time is considered. Particular attention is given to the stability properties of the methods proposed. © 1981, by Academic Press Inc. (London) Limited.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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INFORMS 2022