Conference paper
A high performance 0.15 μm CMOS
G. Shahidi, J. Warnock, et al.
VLSI Technology 1993
Sol-gel methods combined with specific thermal treatments were used to fabricate porous glasses with extremely uniform pore diameters and high internal surface areas. Low-temperature adsorption isotherm measurements reveal the dynamic and thermodynamic stability limits of the liquid films as a function of evolving pore diameter. Contrary to classical predictions, the results are in remarkable agreement with a universal hydrodynamic theory of film behavior which includes substrate interactions. © 1986 The American Physical Society.
G. Shahidi, J. Warnock, et al.
VLSI Technology 1993
R.S. Title, M.W. Shafer
Physical Review B
Ken Chin, Ching-Te Chuang, et al.
CICC 1992
G. V. Subba Rao, M.W. Shafer, et al.
Journal of Physical Chemistry