Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A theory of program-size complexity for something close to real LISP is sketched. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Sankar Basu
Journal of the Franklin Institute
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997