Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A technique for the lateral growth of carbon nanotubes from catalysts embedded in a porous medium using lithographic patterning for positional control was demonstrated. The resultant single wall nanotubes have a preferred orientation perpendicular to the sidewalls of the structure forming the pores.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000