Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A method is presented for designing lossless sliding-block compression schemes that map constrained sequences onto unconstrained ones. The new compression scheme is incorporated into a coding technique for noisy constrained channels, which has applications to magnetic and optical storage. As suggested recently by Immink, the use of a lossless compression code can improve the performance of a modified concatenation scheme where the positions of the error-correcting code and constrained code are reversed (primarily in order to eliminate error propagation due to the constrained code). Examples are presented that demonstrate the advantage of using sliding-block compression over block compression in a noisy constrained setting.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Indranil R. Bardhan, Sugato Bagchi, et al.
JMIS
S. Sattanathan, N.C. Narendra, et al.
CONTEXT 2005
Yun Mao, Hani Jamjoom, et al.
CoNEXT 2006