Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Low-frequency "1/f" noise is a major issue for nanoscale devices such at carbon nanotube transistors. We show that nanoscale ballistic transistors give voltage-dependent sensitivity to the intrinsic potential fluctuations from nearby charge traps. A distinctive dependence on gate voltage is predicted, without reference to the number of carriers. This dependence is confirmed by comparison with recent measurements of nanotube transistors. Possible ways of decreasing the noise are discussed. © 2007 American Chemical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Revanth Kodoru, Atanu Saha, et al.
arXiv
K.N. Tu
Materials Science and Engineering: A
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures