Conference paper
Resist characterization: Procedures, parameters, and profiles
M. Exterkamp, W. Wong, et al.
Proceedings of SPIE 1989
No abstract available.
M. Exterkamp, W. Wong, et al.
Proceedings of SPIE 1989
G. Burks, F.H. Dill, et al.
Proceedings of the IEEE
K. Konnerth, F.H. Dill
Solid-State Electronics
S. Gupta, R.E. Matick, et al.
SID International Symposium 1983