Conference paper
Resist characterization: Procedures, parameters, and profiles
M. Exterkamp, W. Wong, et al.
Proceedings of SPIE 1989
No abstract available.
M. Exterkamp, W. Wong, et al.
Proceedings of SPIE 1989
P.D. Robertson, F.W. Wise, et al.
Proceedings of SPIE 1989
P.S. Hauge, F.H. Dill
Optics Communications
Michael G. Rosenfield, Douglas S. Goodman, et al.
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena