PaperA SIMS study of ion-assisted etching mechanisms; adsorbed fluorine on Si removed by ion bombardmentE.-A. Knabbe, J.W. Coburn, et al.Surface Science
PaperSummary Abstract: Microstructure and electrical conductivity of plasma deposited gold/fluorocarbon composite filmsJ. Perrin, B. Despax, et al.JVSTA
Conference paperSynthesis and physical properties of plasma-polymerized polymer films with metal inclusionsE. KayACS PMSE 1989
PaperMicrostructure and electrical conductivity of plasma deposited gold/fluorocarbon composite filmsa)J. Perrin, B. Despax, et al.JVSTA